Please use this identifier to cite or link to this item: http://hdl.handle.net/1880/26931
Title: Real-time computer control for wafer in rapid thermal processing
Authors: Yu, Ying Diana
Issue Date: 1997
Publisher: University of Calgary
Description: Bibliography: p. 157-161.
UARC
URI: http://hdl.handle.net/1880/26931
ISBN: 0612208915
Appears in Collections:University of Calgary Theses

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