Modeling and simulation of a MEMS-based mass measurement sensor in viscous environments

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ucalgary_2004_said_humud ali_486764.pdf(8.39 MB)
Date
2004
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Bibliography: p. 98-102
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Said, H. A. (2004). Modeling and simulation of a MEMS-based mass measurement sensor in viscous environments (Unpublished master's thesis). University of Calgary, Calgary, AB. doi:10.11575/PRISM/20944
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http://hdl.handle.net/1880/41952
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