Laser Sintering of Thin PZT Film for Sensing Applications
Date
2023-01-26
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Abstract
The discovery of piezoelectric effect has inspired sensor integration. For these applications, the thinness and flexibility of the sensor are key elements because the easily adaptable use of the sensor would benefit the widespread adoption. Thin ceramic-based piezoelectric sensor is advantageous compared to bulk piezoceramic and polymer sensors when it comes to impact on dynamics measurement, due to the minimal alteration to the system under measurement, and higher frequency bandwidth, provided by the low mass and high stiffness, while satisfying constraints in tight spaces. Lead zirconate titanate (PZT) sensor has traditionally been thermally sintered using a furnace. However, this process consumes large amount of time and energy, requiring many hours and heating of the entire chamber. In this investigation, thin PZT underwent laser sintering, whose localized heating reduces time and energy requirements. Furthermore, CNT/PZT nanocomposite film was prepared in which PZT particles were mixed with carbon nanotubes (CNT) to improve the strength and sintering efficiency, utilizing the mechanical and thermal properties of CNT. Laser processing was optimized by alternating the control parameters, material compositions, and deposition height. A multi-physics finite element modelling was performed to approximate the temperature of the sintering process. Sintered films were obtained and were electrically poled to enhance the piezoelectric property. The effectiveness of laser sintering was assessed with and without CNT. The piezoelectric coefficient of laser sintered PZT increased by approximately 10 fold compared to unsintered PZT. Due to CNTs acting as a reinforcement phase and sintering aid, PZT films containing 0.5 wt% CNTs displayed higher strength compared to PZT films without CNTs after laser sintering, while using less sintering energy. The CNT addition made a compromise on piezoelectric property compared to laser sintered PZT, but still at a high level which is easily utilizable. Based on these results, laser sintering can be effectively used to enhance piezoelectric and mechanical properties of PZT and CNT/PZT films, in smaller turnaround period and energy budget.
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Keywords
Laser Sintering, PZT, CNT, Piezoelectricity
Citation
Chuo, Y. (2023). Laser Sintering of Thin PZT Film for Sensing Applications (Master thesis). University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca .