Norman, Steven A.Yu, Ying Diana2005-07-292005-07-291997Yu, Y. D. (1997). Real-time computer control for wafer in rapid thermal processing (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/221140612208915http://hdl.handle.net/1880/26931Bibliography: p. 157-161.xx, 161 leaves ; 30 cm.engUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.QA76.54 .Y8 1997Real-time data processingDigital control systemsRapid thermal processingmaster thesis10.11575/PRISM/22114QA76.54 .Y8 1997