Belostotski, LeonidOkoniewski, MichalXie, Hao2015-09-252015-11-202015-09-252015http://hdl.handle.net/11023/2499The design of the Cerro Chajnantor Atacama Telescope (CCAT) is progressing within the international astronomical community. This thesis examines the feasibility of using CMOS technology to implement a 460 GHz SIW slot antenna for the CCAT Heterodyne Array Instrument. A 46 GHz broadband high-gain SIW slot antenna was designed and tested to verify the SIW slot antenna design procedure. That design demonstrated good agreement between the simulated and measured results. The antenna has a measured gain of 7.8 dBi at 46.2 GHz and bandwidth of 4.72 GHz. Then design of a 460 GHz SIW antenna was conducted in a 65 nm CMOS process. Several methods were used to simplify the design and simulations: an inductor identification layer was introduced to minimize the design-rule restrictions, and an equivalent dielectric layer was calculated to reduce the computational resource for 3D electromagnetic simulations. The proposed antenna has a gain of 0.09 dBi, efficiency of 29.1% and bandwidth of 25.3 GHz.engUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.Engineering--Electronics and ElectricalCMOSSubstrate-Integrated-Waveguide slot antennaTerahertzmaster thesis10.11575/PRISM/24627