Application of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with sih4-nh3 gas mixtures

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dc.contributor.advisorShi, Yujun
dc.contributor.authorEustergerling, Brett David
dc.date.accessioned2017-12-18T21:38:58Z
dc.date.available2017-12-18T21:38:58Z
dc.date.issued2008
dc.descriptionBibliography: p. 168-174en
dc.descriptionSome pages are in colour.en
dc.format.extentxv, 174 leaves : ill. ; 30 cm.en
dc.identifier.citationEustergerling, B. D. (2008). Application of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with sih4-nh3 gas mixtures (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/2010en_US
dc.identifier.doihttp://dx.doi.org/10.11575/PRISM/2010
dc.identifier.urihttp://hdl.handle.net/1880/103011
dc.language.isoeng
dc.publisher.institutionUniversity of Calgaryen
dc.publisher.placeCalgaryen
dc.rightsUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.
dc.titleApplication of laser ionization and electron ionization to the deposition chemistry in the hot-wire chemical vapor deposition process with sih4-nh3 gas mixtures
dc.typemaster thesis
thesis.degree.disciplineChemistry
thesis.degree.grantorUniversity of Calgary
thesis.degree.nameMaster of Science (MSc)
ucalgary.thesis.accessionTheses Collection 58.002:Box 1785 520708948
ucalgary.thesis.notesUARCen
ucalgary.thesis.uarcreleaseyen
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