Concepts and Methods for the Development of Efficient Femtosecond Laser Micromachining Technology
| atmire.migration.oldid | 1958 | |
| dc.contributor.advisor | Tu, Paul | |
| dc.contributor.author | Chang, Gang | |
| dc.date.accessioned | 2014-03-06T22:28:41Z | |
| dc.date.available | 2014-06-16T07:00:24Z | |
| dc.date.issued | 2014-03-06 | |
| dc.date.submitted | 2014 | en |
| dc.description.abstract | The femtosecond pulse laser is a useful tool for micro/nano-machining, which is a fundamental technology for fabricating micro 3D structure devices or components such as micro fluidic devices or micro optical components. However, it is a challenge to control the machining precision since the laser is a non-contact tool and the machining result is affected by various factors. To figure out the influence of these factors, the a concept of named asof laser ablation volume (LAV) is introduced in the thesis research work to describe the ‘shape’ of the laser machining tool. The spatial structure of LAV is investigated to provide the principle to about controling the resolution and the depth evolution in a micro machining process. The shape and the size of LAV are determined by the pre-designed parameters. A computational model based on the shape of LAV has been verified to deal with different combinations of the moving path and moving speed of LAV for the purpose to improve the machining accuracy. Furthermore, based on the concept of LAV, a closed loop control of the micro milling process has been successfully accomplished in which the laser triggered plasma is employed as a real-time feedback indicator. | en_US |
| dc.identifier.citation | Chang, G. (2014). Concepts and Methods for the Development of Efficient Femtosecond Laser Micromachining Technology (Doctoral thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/25407 | en_US |
| dc.identifier.doi | http://dx.doi.org/10.11575/PRISM/25407 | |
| dc.identifier.uri | http://hdl.handle.net/11023/1387 | |
| dc.language.iso | eng | |
| dc.publisher.faculty | Graduate Studies | |
| dc.publisher.institution | University of Calgary | en |
| dc.publisher.place | Calgary | en |
| dc.rights | University of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission. | |
| dc.subject | Applied Mechanics | |
| dc.subject.classification | Femtosecond Laser | en_US |
| dc.subject.classification | Micro machining | en_US |
| dc.subject.classification | Advanced Manufacturing | en_US |
| dc.title | Concepts and Methods for the Development of Efficient Femtosecond Laser Micromachining Technology | |
| dc.type | doctoral thesis | |
| thesis.degree.discipline | Mechanical and Manufacturing Engineering | |
| thesis.degree.grantor | University of Calgary | |
| thesis.degree.name | Doctor of Philosophy (PhD) | |
| ucalgary.item.requestcopy | true |