Real-time computer control for wafer in rapid thermal processing

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dc.contributor.advisorNorman, Steven A.
dc.contributor.authorYu, Ying Diana
dc.date.accessioned2005-07-29T16:28:46Z
dc.date.available2005-07-29T16:28:46Z
dc.date.issued1997
dc.descriptionBibliography: p. 157-161.en
dc.format.extentxx, 161 leaves ; 30 cm.en
dc.identifier.citationYu, Y. D. (1997). Real-time computer control for wafer in rapid thermal processing (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/22114en_US
dc.identifier.doihttp://dx.doi.org/10.11575/PRISM/22114
dc.identifier.isbn0612208915en
dc.identifier.lccQA76.54 .Y8 1997en
dc.identifier.urihttp://hdl.handle.net/1880/26931
dc.language.isoeng
dc.publisher.institutionUniversity of Calgaryen
dc.publisher.placeCalgaryen
dc.rightsUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.
dc.subject.lccQA76.54 .Y8 1997en
dc.subject.lcshReal-time data processing
dc.subject.lcshDigital control systems
dc.subject.lcshRapid thermal processing
dc.titleReal-time computer control for wafer in rapid thermal processing
dc.typemaster thesis
thesis.degree.disciplineElectrical and Computer Engineering
thesis.degree.grantorUniversity of Calgary
thesis.degree.nameMaster of Science (MSc)
ucalgary.item.requestcopytrue
ucalgary.thesis.accessionTheses Collection 58.002:Box 1122 520680221
ucalgary.thesis.notesUARCen
ucalgary.thesis.uarcreleaseyen
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