Experimental evaluation and characterization of MEMS geometry

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dc.contributor.advisorSpiewak, Swavik A.
dc.contributor.authorNewaskar, Rohit S.
dc.date.accessioned2017-12-18T21:10:20Z
dc.date.available2017-12-18T21:10:20Z
dc.date.issued2006
dc.descriptionBibliography: p. 107-114en
dc.format.extentiv, 133 leaves : ill. ; 30 cm.en
dc.identifier.citationNewaskar, R. S. (2006). Experimental evaluation and characterization of MEMS geometry (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/522en_US
dc.identifier.doihttp://dx.doi.org/10.11575/PRISM/522
dc.identifier.urihttp://hdl.handle.net/1880/101523
dc.language.isoeng
dc.publisher.institutionUniversity of Calgaryen
dc.publisher.placeCalgaryen
dc.rightsUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.
dc.titleExperimental evaluation and characterization of MEMS geometry
dc.typemaster thesis
thesis.degree.disciplineMechanical and Manufacturing Engineering
thesis.degree.grantorUniversity of Calgary
thesis.degree.nameMaster of Science (MSc)
ucalgary.thesis.notesUARCen
ucalgary.thesis.uarcreleaseyen
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