Modeling and simulation of a MEMS-based mass measurement sensor in viscous environments

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dc.contributor.advisorKaler, Karan V. I. S.
dc.contributor.authorSaid, Humud Ali
dc.date.accessioned2005-08-16T17:22:22Z
dc.date.available2005-08-16T17:22:22Z
dc.date.issued2004
dc.descriptionBibliography: p. 98-102en
dc.format.extentxvi, 109 leaves : ill. ; 30 cm.en
dc.identifier.citationSaid, H. A. (2004). Modeling and simulation of a MEMS-based mass measurement sensor in viscous environments (Master's thesis, University of Calgary, Calgary, Canada). Retrieved from https://prism.ucalgary.ca. doi:10.11575/PRISM/20944en_US
dc.identifier.doihttp://dx.doi.org/10.11575/PRISM/20944
dc.identifier.isbn0494037261en
dc.identifier.lccAC1 .T484 2004 S3263en
dc.identifier.urihttp://hdl.handle.net/1880/41952
dc.language.isoeng
dc.publisher.institutionUniversity of Calgaryen
dc.publisher.placeCalgaryen
dc.rightsUniversity of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission.
dc.titleModeling and simulation of a MEMS-based mass measurement sensor in viscous environments
dc.typemaster thesis
thesis.degree.disciplineElectrical and Computer Engineering
thesis.degree.grantorUniversity of Calgary
thesis.degree.nameMaster of Science (MSc)
ucalgary.thesis.accessionTheses Collection 58.002:Box 1535 520492052
ucalgary.thesis.notesUARCen
ucalgary.thesis.uarcreleaseyen
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